Synthesis and Electrical Properties of Phosphorus-Doped Homoepitaxial Diamond (111) by Microwave Plasma-Assisted Chemical Vapor Deposition Using Triethylphosphine as a Dopant Source
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概要
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A phosphorus-doped (111) diamond film was formed homoepitaxially on a nondoped diamond film, which was also formed homoepitaxially on a type Ib (111) diamond substrate, by microwave plasma-assisted chemical vapor deposition using CH_4 as the carbon source and triethylphosphine (TEP, P(C_2H_5)_3) as the dopant source. The P-doped film, which was approximately 800 nm in thickness, exhibited an n-type conduction in the temperature range of 100-500 K. This represents the first such observation, for a film prepared using TEP as the dopant. The activation energy for carrier concentration was 0.09 eV in the range of 145-500 K. The Hall mobility reached a maximum of approximately 3.5 cm^2/(V・s) at 145 K and decreased to 0.15 cm^2/(V・s) at 500 K. Phosphorus was uniformly incorporated into the diamond film, as evidenced by secondary ion mass spectrometry.
- 社団法人応用物理学会の論文
- 1998-05-01
著者
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Asano Tanemasa
Center For Microelectronic Systems Kyushu Institute Of Technology
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MAEDA Hideaki
Department of Molecular and Material Sciences, Interdiscplinary Graduate School of Engineering Scien
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HAYASHI Yasunori
Department of Materials Science and Engineering, Faculty of Engineering, Kyushu University
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KUSAKABE Katsuki
Department of Living Environmental Science, Fukuoka Women's University
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Maeda Hideaki
Nanotechnology Research Institute National Institute Of Advanced Industrial Science And Technology
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Saito Takeyasu
Department Of Materials Physics And Chemistry Graduate School Of Engineering Kyushu University
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Saito Takeyasu
Department Of Chemical Engineering Faculty Of Engineering The University Of Tokyo
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草壁 克己
福岡女子大学人間環境学部
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KAMETA Masanori
Department of Materials Physics and Chemistry, Graduate School of Engineering, Kyushu University
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MOROOKA Shigeharu
Department of Materials Physics and Chemistry, Graduate School of Engineering, Kyushu University
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Maeda Hideaki
Nanotechnology Research Institute National Institute Of Advanced Industrial Science And Technology (
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Hayashi Yasunori
Department Of Materials Physics And Chemistry Graduate School Of Engineering Kyushu University
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Maeda Hideaki
Department Chemistry & Biochemistry Graduate School Of Engineering Kyushu University
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Kusakabe Katsuki
Department Of Applied Chemistry Graduate School Of Engineering Kyushu University
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Kameta Masanori
Department Of Materials Physics And Chemistry Graduate School Of Engineering Kyushu University
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Morooka Shigeharu
Department Of Applied Chemistry Kyushu University
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