Hydrogen Implantation Effects on the Electrical and Optical Properties of Metal Nitride Thin Films
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概要
- 論文の詳細を見る
- Japan Institute of Metalsの論文
- 2002-05-01
著者
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ISHIKAWA Tsutomu
Department of Medicinal Organic Chemistry, Graduate School of Pharmaceutical Sciences, Chiba Univers
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MASUDA Masataka
Department of Materials Science & Engineering, Kyushu University
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Masuda M
Department Of Materials Science And Engineering Kyushu University
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Masuda Masataka
Department Of Materials Science And Engineering Faculty Of Engineering
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HAYASHI Yasunori
Department of Materials Science and Engineering, Faculty of Engineering, Kyushu University
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Ishikawa Tsutomu
Department Of Medicinal Organic Chemistry Graduate School Of Pharmaceutical Sciences Chiba Universit
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Hayashi Yasunori
Department Of Materials Physics And Chemistry Graduate School Of Engineering Kyushu University
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Hayashi Yasunori
Department Of Materials Science And Engineering Kyushu University
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Ishikawa Tsutomu
Department Of Materials Science And Engineering Kyushu University
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ISHIKAWA TSUTOMU
Department of Chemical Engineering, Tokyo Institute of Technology
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