Conformal Step Coverage and Trench Filling of Liquid Phase Oxide Deposition

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1999-09-15

著者

• Lin Chein-hsin

  Department Of Electronics Engineering & Institute Of Electronics National Chiao Tung University

• Lin C‐h

  Department Of Materials Science And Engineering Tsing-hut University

• LEE Ming-Kwei

  Department of Electrical Engineering, National Sun Yat-sen University

• LIN Chen-Hsi

  Winbond Electronics Corp.

• Lee M‐k

  National Sun Yat‐sen Univ. Kaohsiung Twn

• YANG Ching-Nan

  Department of Electrical Engineering, National Sun Yat-Sen University

• LIN Ching-Hsing

  Department of Electrical Engineering, National Sun Yat-Sen University

• Lin C‐h

  Department Of Physics National Cheng Kung University

• Lee Ming-kwei

  Department Of Elecrrical Engineering National Sun Yat-sen University

• Yang Ching-nan

  Department Of Electrical Engineering National Sun Yat-sen University

• Yang Ching-nan

  Department Of Elecrrical Engineering National Sun Yat-sen University

• Lin Ching-Hsing

  Department of Elecrrical Engineering, National Sun Yat-sen University

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