Improvement of Effective Charges in Oxynitride Prepared by Liquid Phase Deposition on Silicon
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概要
- 論文の詳細を見る
Using an aqueous solution of ammonia hydroxide aqua, hydrosilicofluoric acid and boric acid, an oxynitride film can be grown. Nitrogen atoms are accumulated at the interface of the oxynitride film and silicon substrate. With subsequent thermal annealing in nitrogen, the effective oxide charges of the oxynitride can be improved.
- 社団法人応用物理学会の論文
- 1998-01-15
著者
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LEE Ming-Kwei
Department of Electrical Engineering, National Sun Yat-sen University
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Yang Chi-da
Department Of Electrical Engineering National Sun Yat-sen University
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Lee Ming-kwei
Department Of Elecrrical Engineering National Sun Yat-sen University
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LIN Chung-Hsing
Department of Electrical Engineering, National Sun Yat-sen University
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LET Bo-Hsiung
Department of Electrical Engineering, National Sun Yat-sen University
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Let Bo-hsiung
Department Of Electrical Engineering National Sun Yat-sen University
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Lin Chung-hsing
Department Of Electrical Engineering National Sun Yat-sen University
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