Novel Sidewall Capping for Degradation-Free Damascene Trenches of Low-Permittivity Methylsilsesquioxane

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-04-15

著者

• Lin Chein-hsin

  Department Of Electronics Engineering & Institute Of Electronics National Chiao Tung University

• YEH Ching-Fa

  Department of Electronics Engineering & Institute of Electronics, National Chiao-Tung University

• Wu Kwo-hau

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

• LEE Yueh-Chuan

  Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University

• SU Yuh-Ching

  Department of Electronics Engineering & Institute of Electronics, National Chiao Tung University

• Wu Kaung-hsiung

  Department Of Electrophysics National Chiao Tung University

• LIN Chen-Hsi

  Winbond Electronics Corp.

• Su Yuh-ching

  Department Of Electronics Engineering & Institute Of Electronics National Chiao Tung University

• Wu K‐h

  National Chiao‐tung Univ. Hsinchu Twn

• Lee Y‐c

  Electronic Ceramics Research Center

• Yeh C‐f

  National Chiao‐tung Univ. Hsinchu Twn

• Lee Y‐c

  Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University

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