Excellent Quality of SiO_2 Dielectric Film Prepared by Room-Temperature Ion Plating and Its Application to Thin-Film Transistors
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概要
- 論文の詳細を見る
- 1995-08-21
著者
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YEH Ching-Fa
Department of Electronics Engineering & Institute of Electronics, National Chiao-Tung University
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Chen Tai-ju
Department Of Electronics Engineering & Institute Of Electronics National Chiao-tung University
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Yeh Ching-fa
Department Of Electronics Engineering & Institute Of Electronics National Chiao-tung University
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Fan Ching-lin
Department Of Electronics Engineering & Institute Of Electronics National Chiao-tung University
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KAO Jiann-Shiun
Precision Instrument Development Center, National Science Council
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Kao Jiann-shiun
Precision Instrument Development Center National Science Council
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Yeh Ching-Fa
Department of Electronics Engineering & Institute of Electronics, National Chiao-Tung University
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Fan Ching-Lin
Department of Electronic Engineering and Institute of Electronics, National Taiwan University of Science and Technology, 43 Sec. 4, Keelung Road, Taipei 106, Taiwan, R.O.C.
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