Novel Barrier Dielectric Liner Prepared by Liquid-Phase Deposition and NH_3-Plasma Annealing
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-12-15
著者
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YEH Ching-Fa
Department of Electronics Engineering & Institute of Electronics, National Chiao-Tung University
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Wu Kwo-hau
Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University
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LEE Yueh-Chuan
Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University
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CHEN Chi-Ming
Department of Electronics Engineering and Institute of Electronics, National Chiao Tung University
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Wu Kaung-hsiung
Department Of Electrophysics National Chiao Tung University
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Wu K‐h
National Chiao‐tung Univ. Hsinchu Twn
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Lee Y‐c
Electronic Ceramics Research Center
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Yeh C‐f
National Chiao‐tung Univ. Hsinchu Twn
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Chen Chi-ming
Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University
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Chen Chi-ming
Department Of Applied Mathematics National Hsinchu University Of Education
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Lee Y‐c
Department Of Electronics Engineering And Institute Of Electronics National Chiao Tung University
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