Experimental Comparison of Off-State Current between High-Temperature- and Low-Temperature-Processed Undoped Channel Polysilicon Thin-Film Trarnsistors
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-10-15
著者
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Yang Yu-chi
Institute Of Electro-physics National Chiao-tung University
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YEH Ching-Fa
Institute of Electronics, National Chiao-Tung University
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YANG Tzung-Zu
Institute of Electronics, National Chiao-Tung University
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CHEN Chun-Lin
Institute of Electronics, National Chiao-Tung University
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CHEN Tai-Ju
Institute of Electronics, National Chiao-Tung University
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Chen T‐j
National Chiao Tung Univ. Twn
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Yeh C‐f
National Chiao‐tung Univ. Hsinchu Twn
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Yeh Ching-fa
Institute Of Electronics National Chiao Tang University
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Yang Tzung-zu
Department Of Electronics Engineering & Institute Of Electronics National Chiao-tung University
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Chen Chun-lin
Department Of Electronics Engineering & Institute Of Electronics National Chiao-tung University
関連論文
- Low-Temperature-Processed Poly-Si Thin-Film Transistors Using Solid-Phase-Crystallized and Liquid-Phase-Deposited Gate Oxide
- Experimental Comparison of Off-State Current between High-Temperature- and Low-Temperature-Processed Undoped Channel Polysilicon Thin-Film Trarnsistors
- Novel Barrier Dielectric Liner Prepared by Liquid-Phase Deposition and NH_3-Plasma Annealing
- Novel Sidewall Capping for Degradation-Free Damascene Trenches of Low-Permittivity Methylsilsesquioxane
- Device Transfer Technology by Backside Etching (DTBE) for Poly-Si Thin-Film Transistors on Glass/Plastic Substrate
- Novel Device Transfer Technology by Backside Etching (DTTBE) for High Performance Poly-Si TFTs on Plastic Substrate
- Novel Device Transfer Technology by Backside Etching (DTTBE) for High Performance Poly-Si TFTs on Plastic Substrate
- The Characterization of Al_2O_3 Prepared by Anodic Oxidation
- Characterization and Reliability of Lightly-Doped-Drain Polysilicon Thin-Film Transistors with Oxide Sidewall Spacer Formed by One-Step Selective Liquid Phase Deposition
- The Effect of Temperature on I-V Characteristics of a-Si:H Photodiode
- The Novel Preparation of P-N Junction Mesa Diodes by Silicon-Wafer Direct Bonding (SDB)
- Characterization and Reliability of Lightly-Doped-Drain Polysilicon Thin-Film Transistors with Oxide Sidewall Spacer Formed by One-Step Selective Liquid Phase Deposition
- Investigation of Thermal Coefficient for Polycrystalline Silicon Thermal Sensor Diode