Device Transfer Technology by Backside Etching (DTBE) for Poly-Si Thin-Film Transistors on Glass/Plastic Substrate

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概要

• 論文の詳細を見る
• Japan Society of Applied Physicsの論文
• 2003-09-15

著者

• Wang Shuo-cheng

  Department Of Electronics Engineering & Institute Of Electronics National Chiao-tung University

• YEH Ching-Fa

  Department of Electronics Engineering & Institute of Electronics, National Chiao-Tung University

• HUANG Chien-Kai

  Department of Electronics Engineering & Institute of Electronics, National Chiao-Tung University

• DAI Yuan-Tung

  Electronics Research & Service Organization of Industrial Technology Research Institute

• Yeh C‐f

  National Chiao‐tung Univ. Hsinchu Twn

関連論文

• Low-Temperature-Processed Poly-Si Thin-Film Transistors Using Solid-Phase-Crystallized and Liquid-Phase-Deposited Gate Oxide
• Experimental Comparison of Off-State Current between High-Temperature- and Low-Temperature-Processed Undoped Channel Polysilicon Thin-Film Trarnsistors
• Novel Barrier Dielectric Liner Prepared by Liquid-Phase Deposition and NH_3-Plasma Annealing
• Novel Sidewall Capping for Degradation-Free Damascene Trenches of Low-Permittivity Methylsilsesquioxane
• Device Transfer Technology by Backside Etching (DTBE) for Poly-Si Thin-Film Transistors on Glass/Plastic Substrate
• Novel Device Transfer Technology by Backside Etching (DTTBE) for High Performance Poly-Si TFTs on Plastic Substrate
• Novel Device Transfer Technology by Backside Etching (DTTBE) for High Performance Poly-Si TFTs on Plastic Substrate
• The Characterization of Al_2O_3 Prepared by Anodic Oxidation
• Leakage Current Conduction Mechanism of Liquid Phase Deposited (LPD)SiO_2 Film
• Highly Reliable Liquid-Phase-Deposited SiO_2 with Nitrous Oxide Plasma Post-Treatment for Low-Temperature-Processed Polysilicon Thin Film Transistors
• Structure Recovery and Motion Estimation from Stereo Motion (Special Issue on Computer Vision)
• Excellent Quality of SiO_2 Dielectric Film Prepared by Room-Temperature Ion Plating and Its Application to Thin-Film Transistors
• Improved I-V Characteristics of Polysilicon Thin Film Transistors with Novel Dual-Buffer Drain Structure
• Impact of Air Filter Material on Metal Oxide Semiconductor (MOS) Device Characteristics in HF Vapor Environment
• Device Transfer Technology by Backside Etching (DTBE) for Poly-Si Thin-Film Transistors on Glass/Plastic Substrate

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