マイクロマシンで作るPDMSチャンバの中でのブラウン運動の観察と制御(センサデバイス・MEMS・一般)

概要

論文の詳細を見る
We encapsulated a silicon nanoneedle of 3.5μm in length and 170nm in diameter with an approximate aspect ratio of 20 in a 6μm diameter-PDMS microchamber containing DI water. We could observe Brownian motion of the nanoneedles. The nanoneedle can experience rotational motion. The control of the motion and alignment are accomplished by an electric field. Silicon nanoneedles having high aspect ratios such as 20 are possible if nanobeads are used as mask in Deep RIE of silicon. After an ultrasonic bath, needles can be collected by centrifuging. PDMS chambers 2, 4, 6, and 8μms in diameter and 2.2μm in depth are fabricated by replicating structures on SOI wafer. The needle solution is sandwiched between a glass substrate and PDMS chambers. Observation is done by an inverted microscope.
社団法人電子情報通信学会の論文
2005-08-26