MNM-2B-1 MEMSを用いたDLC界面間におけるスティックスリップのTEMその場観察及び力計測(セッション 2B マイクロ・ナノトライボロジー)

概要

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Diamond-Like Carbon (DLC) can have a high mechanical hardness, very low coefficient of friction, high wear resistance and chemical inertness. Because of these useful characteristics, special attention has been paid attention to the tribological study of the DLC. Recently, the target scale of the tribological research on the DLC inter facial layer reached down to nano scale. These research activities, however, have not achieved the real time observation of the DLC contact layers yet. Therefore, we have the combined precise motion controllability of MEMS technology with the high resolution imaging of TEM. In this experiment, we have achieved the in-situ observation of the stick-slip motion between DLC interfacial layers. We have also attained the measurement of the frictional force between the DLC surfaces.
2010-10-12