F-1 MEMS銀探針のナノせん断破壊に伴う界面変形の実時間TEM観測(マイクロナノ理工学)

概要

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Observing real time deformation at the atomic-scale has been a great challenge because of the difficulty in both formation and observation of nano-contacts. We have combined nano-scale handling capabilities of MEMS technology with the supreme observation ability of TEM and developed a MEMS-in-TEM experimental setup. Our MEMS device had Ag tips controlled by electrostatic actuators. Opposing tips were brought into contact using the actuator. After achieving the contact, Ag-coated opposing tip was actuated in lateral direction while maintaining the contact. We succeeded in observing the deformation of the frictional interface at the boundaries of the gliding grains. Furthermore, we have observed that the interface was reorganized because of the dislocated strain.
2010-03-16