434 3次元ナノ構造物評価用電子顕微鏡内走査型プローブ顕微鏡(SEM-SPM)(光メカトロニクスII)(OS.6 ナノ構造創成をめざす光メカトロニクスの展開)

概要

論文の詳細を見る
We have developed a new versatile scanning electron microscope (SEM)-atomic force microscope (AFM) system with a capability of simultaneous SEM and AFM operation for the measurement of mechanical characteristics of three dimensional nanometric structures. The system consists of a SEM and a detachable AFM module that fits on the multi-degree of freedom stage of the SEM. The sample stage of the AFM module is equipped with remote controlled piezoelectric actuators enabling three degree of freedom positioning with sub-nanometer resolution and millimeter range. By pressing the sample with the cantilever of the AFM and measuring the force-distance curve, spring constant, of the sample can be measured. The SEM-AFM system can also be used as a tool for micro scale processing and manipulation by replacing the cantilever with a designated probe.
社団法人日本機械学会の論文
2001-03-09