磁気吸引浮上機能を有する二形式のステップモータ

概要

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The authors have developed two types of stepping motors with a function of magnetic suspension. Since the motors have, in their relatively simple and compact structure, the function of magnetic suspension and positioning at once, they are suitable for use in cleanrooms, vacuum chambers and hostile environments. Due to the characteristic toothed pole structure of the motors, attractive force fluctuation per tooth is inevitable as the motors are propelled. However, the authors have succeeded in designing the motors so that the sum attractive force becomes relatively constant and insensitive to the position of the slider in the direction of propulsion, resulting in the realisation of stable suspension by a conventional servo circuit used for ordinary magnetic bearings. The paper will discuss the following: (i) structure of two types of stepping motors; (ii) magnetomotive force of coils; (iii) attractive force calculation; (iv) control circuit, (v) experiment and performance; and (vi) comparison of two types.
社団法人電気学会の論文