Extraction of Vertical, Lateral Locations and Energies of Hot-Electrons-Induced Traps through the Random Telegraph Noise
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概要
- 論文の詳細を見る
As device size shrinks smaller, not only random telegraph signal (RTS) noise, which is caused by the trapping and de-trapping of a single carrier but also the degradation of gate oxide due to hot-carrier stress become a serious issue. In this paper, random telegraph signal (RTS) measurements have been used to study individual hot-carrier-induced traps in n-type metal oxide semiconductor field effect transistor (nMOSFETs). Trap depth ($x_{\text{T}}$), lateral location ($y_{\text{T}}$), and trap energy ($E_{\text{Cox}}-E_{\text{T}}$) of stress-induced traps are founded to be different from those of process-induced traps. Also, we confirmed the hot-carrier stress induced traps are located near drain region.
- 2009-04-25
著者
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Lee Jong
School Of Adv. Mat. Sci. & Eng. Sungkyunkwan Univ.
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Shin Hyungcheol
School Of Electrical Engineering And Computer Science Seoul National University
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Kang Daewoong
School Of Electrical Engineering Seoul National University
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Shin Hyungcheol
School of Electrical Engineering, Seoul National University, San 56-1, Shinlim-dong, Kwanak-gu, Seoul 151-742, Korea
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Park Byung-Gook
School of Electrical Engineering and Computer Science, Seoul National University, San 56-1, Shinlim-Dong, Kwanak-Gu, Seoul 151-742, Korea
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Kim Jinho
CIS PA, LSI Division, Samsung Electronics Co., Ltd., San #24, Nongseo-dong, Giheung-gu, Yongin, Gyeonggi, 449-711, Korea
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Lee Duckhyung
CIS PA, LSI Division, Samsung Electronics Co., Ltd., San #24, Nongseo-dong, Giheung-gu, Yongin, Gyeonggi, 449-711, Korea
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Park Byung-Gook
School of Electrical Engineering & Inter-University Semiconductor Research Center (ISRC), Seoul National University, Shilim-Dong, Kwanak-Gu, Seoul 151-742, Republic of Korea
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Kang Daewoong
School of Electrical Engineering, Seoul National University, San 56-1, Shinlim-dong, Kwanak-gu, Seoul 151-742, Korea
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Lee Jong
School of Electrical Engineering, Seoul National University, San 56-1, Shinlim-dong, Kwanak-gu, Seoul 151-742, Korea
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Shin Hyungcheol
School of Electrical Eng.
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Park Byung-Gook
School of EECS and ISRC, Seoul National University, Seoul 151-742, Korea
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