Dependence of Contact Resistance on Substrate Doping and Impact of Mixed Ion Implantation
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-10-15
著者
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LEE Jong
School of Electrical Engineering, Seoul National University
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Lee Jong
School Of Adv. Mat. Sci. & Eng. Sungkyunkwan Univ.
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Chung Sang-tae
Semiconductor Advanced Research Division Hyundai Electronics Industries Co. Ltd
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Park Gyung
School Of Electrical Engineering Seoul National University
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Koh Yo-hwan
Semiconductor Advanced Research Division Hyundai Electronics Industries Co. Ltd
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Heo Yeon-Cheol
Semiconductor Advanced Research Division, Hyundai Electronics Industries Co., Ltd
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Park Chan
Semiconductor Advanced Research Division, Hyundai Electronics Industries Co., Ltd
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Lee Jeong-Ho
Semiconductor Advanced Research Division, Hyundai Electronics Industries Co., Ltd
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Lee Jeong-ho
Semiconductor Advanced Research Division Hyundai Electronics Industries Co. Ltd
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Heo Yeon-cheol
Semiconductor Advanced Research Division Hyundai Electronics Industries Co. Ltd
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Park Chan
Semiconductor Advanced Research Division Hyundai Electronics Industries Co. Ltd
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