Simple Wide-Band Metal-Insulator-Metal (MIM) Capacitor Model for RF Applications and Effect of Substrate Grounded Shields
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概要
- 論文の詳細を見る
In this paper, we propose a simple wide-band metal-insulator-metal (MIM) capacitor model incorporating the skin effect in the gigahertz regions. The proposed model accurately describes the frequency-dependent series resistance over a wide range of frequencies and hence enables the quality factor of the MIM capacitor to be predicted with high accuracy in the multi-GHz frequency regime. Since the proposed model consists of frequency-independent lumped elements, it can be easily implemented in simulation program with integrated circuit emphasis (SPICE)-compatible simulators. We also demonstrate the scalability of the proposed model for different device geometries. In addition, we present the characterized results for MIM capacitors under various substrate conditions including different shield materials.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-04-15
著者
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Lee Seung-wook
Department Of Electrical Engineering And Computer Science Korea Advanced Institute Of Science And Te
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Shin Hyungcheol
School Of Electrical Engineering And Computer Science Seoul National University
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GIL Joonho
Radio Pulse Inc.
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Song Seong-sik
Department Of Electrical Engineering And Computer Science Korea Advanced Institute Of Science And Te
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Shin Hyungcheol
School of Electrical Engineering, Seoul National University, San 56-1, Shilim-dong, Gwanak-gu, Seoul 151-742, Republic of Korea
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Gil Joonho
Radio Pulse Inc., 805 KIPA B/D, 79-2 Garakbon-dong, Songpa-gu, Seoul 138-711, Republic of Korea
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Song Seong-Sik
Department of Electrical Engineering and Computer Science, Korea Advanced Institute of Science and Technology, 373-1 Guseong-dong, Yuseong-gu, Daejeon 305-701, Republic of Korea
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Shin Hyungcheol
School of Electrical Eng.
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