Proton Dynamics in Chemically Amplified Electron Beam Resists
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概要
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The proton dynamics of poly(4-hydroxystyrene) (PHS) films were investigated using Coumarin 6 (C6). The acid density was 0.022 nm-3 at the exposure dose of 10 μC cm-2 (75 keV electron beam). The absorption intensity of C6 proton adducts was saturated at a certain concentration of C6, indicating an almost complete addition of protons at this C6 concentration. Protons can move in PHS films near C6 molecules even at room temperature. Also, the absorbed dose was estimated using 60Co $\gamma$-rays. The acid yield can be well explained by an acid generation model involving the ionization of a base polymer.
- 2004-07-01
著者
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Sato Mitsuru
Tokyo Ohka Kogyo Co. Ltd.
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TAGAWA Seiichi
Tokyo Ohka Kogyo Co., Ltd.
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Ando Tomoyuki
Tokyo Ohka Kogyo Co. Ltd.
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Komano Hiroji
Tokyo Ohka Kogyo Co. Ltd.
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Nakano Atsuro
The Institute Of Scientific And Industrial Research Osaka University
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Okamoto Kazumasa
The Institute Of Scientific And Industrial Research Osaka University
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Yamamoto Yukio
The Institute Of Scientific And Industrial Research Osaka University
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Ando Tomoyuki
Tokyo Ohka Kogyo Co., Ltd., 1590 Tabata, Samukawa, Koza, Kanagawa 253-0114, Japan
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Yamamoto Hiroki
The Institute of Scientific and Industrial Research (ISIR), Osaka University, Ibaraki, Osaka 567-0047, Japan
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KOZAWA Takahiro
The Institute of Scientific and Industrial Research (ISIR), Osaka University
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Yamamoto Yukio
The Institute of Scientific and Industrial Research, Osaka University, 8-1 Mihogaoka, Ibaraki, Osaka 567-0047, Japan
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Komano Hiroji
Tokyo Ohka Kogyo Co., Ltd., 1590 Tabata, Samukawa, Koza, Kanagawa 253-0114, Japan
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Okamoto Kazumasa
The Institute of Scientific and Industrial Research, Osaka University, 8-1 Mihogaoka, Ibaraki, Osaka 567-0047, Japan
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Nakano Atsuro
The Institute of Scientific and Industrial Research, Osaka University, 8-1 Mihogaoka, Ibaraki, Osaka 567-0047, Japan
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