Modeling and Simulation of Acid Diffusion in Chemically Amplified Resists with Polymer-Bound Acid Generator
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概要
- 論文の詳細を見る
- 2012-07-25
著者
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Kozawa Takahiro
The Institute Of Scientific And Industrial Research Osaka University
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Itani Toshiro
Euvl Infrastructure Dev. Center Inc. (eidec) Ibaraki Jpn
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Santillan Julius
Euvl Infrastructure Dev. Center Inc. (eidec) Ibaraki Jpn
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Itani Toshiro
Euvl Infrastructure Development Center Inc. (eidec)
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Santillan Julius
Euvl Infrastructure Development Center Inc. (eidec)
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KOZAWA Takahiro
The Institute of Scientific and Industrial Research (ISIR), Osaka University
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