Relationship between Sensitivities of Chemically Amplified Resist Based on Adamantane Derivatives upon Exposure to ArF Excimer Laser, Electron Beam, and Extreme Ultraviolet Radiation
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概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2008-06-25
著者
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TAGAWA Seiichi
The Institute of Scientific and Industrial Research, Osaka University
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関 修平
大阪大学産業科学研究所
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Seki Shu
The Institute Of Scientific And Industrial Research
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Seki S
Osaka Univ. Osaka
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KOZAWA Takahiro
The Institute of Scientific and Industrial Research, Osaka University
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Seki S
Dep. Of Applied Chemistry Graduate School Of Engineering Osaka Univ.
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Tagawa S
The Inst. Of Scientific And Industrial Res. Osaka Univ.
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Tagawa Seiichi
The Institute Of Scientific And Industrial Research
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Kozawa Takahiro
The Institute Of Scientific And Industrial Research Osaka University
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FURUKAWA Kikuo
Mitsubishi Gas Chemical Co., Inc.
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Seki Seiji
Department Of Chemistry Faculty Of Science Tohoku University
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Tagawa S
Osaka Univ. Osaka Jpn
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Furukawa Kikuo
Mitsubishi Gas Chemical Co. Inc.
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古沢 孝弘
Osaka University
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KOZAWA Takahiro
The Institute of Scientific and Industrial Research (ISIR), Osaka University
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