Polymer-Structure Dependence of Acid Generation in Chemically Amplified Extreme Ultraviolet Resists
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概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2007-02-25
著者
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TAGAWA Seiichi
The Institute of Scientific and Industrial Research, Osaka University
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KOZAWA Takahiro
The Institute of Scientific and Industrial Research, Osaka University
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YAMAMOTO Hiroki
The Institute of Scientific and Industrial Research, Osaka University
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CAO Heidi
Intel Corporation
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DENG Hai
Intel Corporation
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LEESON Michael
Intel Corporation
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