Low-Temperature Growth of Nanocrystalline Diamond by Reactive Pulsed Laser Deposition under a Hydrogen Atmosphere
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概要
- 論文の詳細を見る
By reactive pulsed laser deposition under a hydrogen atmosphere, nanocrystalline diamond (NCD) films containing amorphous carbon were grown at a substrate temperature of 550°C. The deposition rate was 80 nm/min. The transmission electron microscopy (TEM) observation showed that nonoriented nanocrystalline diamond films, whose crystallite diameters were 10–20 nm, were grown at an optimum hydrogen pressure of 4 Torr. The deposited films had smooth surfaces on a nanoscale.
- Japan Society of Applied Physicsの論文
- 2004-02-15
著者
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Zhu Ling
Department Of Applied Science For Electronics And Materials Kyushu University
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Itakura Masaru
Department Of Applied Science For Electronics And Materials Kyushu University
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Tomokiyo Yoshitsugu
Department Of Applied Science For Electronics And Materials Kyushu University
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Kuwano Noriyuki
Department Of Applied Science For Electronics And Materials Interdisciplinary Graduate School Of Eng
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Yoshitake Tsuyoshi
Department Of Applied Science For Electronics And Materials Kyushu University
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Fukugawa Tomohito
Department Of Applied Science For Electronics And Materials Kyushu University
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Hara Takeshi
Department Of Animal Resource Sciences Graduate School Of Agricultural And Life Sciences The Univers
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Nagayama Kunihito
Department Of Aeronautics And Astronautics
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Nagayama Kunihito
Department of Aeronautics and Astronautics, Kyushu University, 6-10-1 Hakozaki, Higashiku, Fukuoka 812-8580, Japan
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Yoshitake Tsuyoshi
Department of Applied Science for Electronics and Materials, Kyushu University, 6-1 Kasuga, Fukuoka 816-8580, Japan
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Yoshitake Tsuyoshi
Department of Applied Physics, Faculty of Engineering, Kyushu University
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Zhu Ling
Department of Applied Science for Electronics and Materials, Kyushu University, 6-1 Kasuga, Fukuoka 816-8580, Japan
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Kuwano Noriyuki
Department of Applied Science for Electronics and Materials, Kyushu University, 6-1 Kasuga, Fukuoka 816-8580, Japan
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Hara Takeshi
Department of Applied Science for Electronics and Materials, Kyushu University, 6-1 Kasuga, Fukuoka 816-8580, Japan
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Fukugawa Tomohito
Department of Applied Science for Electronics and Materials, Kyushu University, 6-1 Kasuga, Fukuoka 816-8580, Japan
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