Transmission Electron Diffraction Analysis of Crystallographic Orientation of β-FeSi_2 Produced by Sputtering on Si(001) Substrate
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概要
- 論文の詳細を見る
- 2003-01-15
著者
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Itakura M
Department Of Applied Science For Electronics And Materials Kyushu University
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Itakura Masaru
Department Of Applied Science For Electronics And Materials Kyushu University
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KUWANO Noriyuki
Advanced Science and Technology Center for Cooperative Research, Kyushu University
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NORIZUMI Daigo
Department of Applied Science for Electronics and Materials, Kyushu University
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FUKUYAMA Tomohiro
Department of Applied Science for Electronics and Materials, Kyushu University
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