Transmission Electron Diffraction Analysis of Crystallographic Orientation of $\beta$-FeSi2 Produced by Sputtering on Si(001) Substrate
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概要
- 論文の詳細を見る
A practical procedure to distinguish $b$- and $c$-axes of $\beta$-FeSi2 by a conventional transmission electron diffraction (TED) method has been demonstrated using $\beta$-FeSi2 formed on a Si substrate. The TED patterns for $\beta$-FeSi2 with the incidence of [010] and [001] are almost the same as in the zeroth-order Laue zone. However, they can be distinguished from each other by the arrangement of diffraction spots in the first-order Laue zone.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2003-01-15
著者
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Itakura Masaru
Department Of Applied Science For Electronics And Materials Kyushu University
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FUKUYAMA Tomohiro
Department of Applied Science for Electronics and Materials, Kyushu University
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Kuwano Noriyuki
Advanced Science And Technology Center For Cooperative Research Kyushu University
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Norizumi Daigo
Department Of Applied Science For Electronics And Materials Kyushu University
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Norizumi Daigo
Department of Applied Science for Electronics and Materials, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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Fukuyama Tomohiro
Department of Applied Science for Electronics and Materials, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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