Structural and Physical Characteristics of Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Composite Films Deposited Using a Coaxial Arc Plasma Gun
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概要
- 論文の詳細を見る
Ultrananocrystalline diamond (UNCD)/hydrogenated amorphous carbon (a-C:H) films were formed without initial nucleation using a coaxial arc plasma gun. The UNCD crystallite diameters estimated from the X-ray diffraction peaks were approximately 2 nm. The Fourier transform infrared absorption spectrum exhibited an intense sp3-CH peak that might originate from the grain boundaries between UNCD crystallites whose dangling bonds are terminated with hydrogen atoms. A narrow sp3 peak in the photoemission spectrum implied that the film comprises a large number of UNCD crystallites. Large optical absorption coefficients at photon energies larger than 3 eV that might be due to the grain boundaries are specific to the UNCD/a-C:H films.
- 2010-01-25
著者
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Agawa Yoshiaki
Ulvac
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Nagayama Kunihito
Department Of Aeronautics And Astronautics
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Sumitani Kazushi
SAGA Light Source, Tosu, Saga 841-0005, Japan
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Ohtani Ryota
SAGA Light Source, Tosu, Saga 841-0005, Japan
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Nakagawa You
Department of Applied Science for Electronics and Materials, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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Yoshitake Tsuyoshi
Department of Applied Science for Electronics and Materials, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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Yoshitake Tsuyoshi
Department of Applied Physics, Faculty of Engineering, Kyushu University
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Nagano Akira
Department of Applied Science for Electronics and Materials, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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Setoyama Hiroyuki
SAGA Light Source, Tosu, Saga 841-0005, Japan
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Kobayashi Eiichi
SAGA Light Source, Tosu, Saga 841-0005, Japan
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