Effects of Aluminum Incorporation on Diamond Grain Growth in Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Composite Films Prepared by Coaxial Arc Plasma Deposition
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概要
- 論文の詳細を見る
Al-incorporated ultrananocrystalline diamond/hydrogenated amorphous carbon composite films were prepared by coaxial arc plasma deposition with an Al-blended graphite target. The grain size estimated from X-ray diffraction peaks was 27 nm; this value is an order of magnitude larger than that of unincorporated films. The appearance of diamond-200 and 222 peaks, which generally disappear due to the extinction rule of diffraction, and the dilation of lattice, implied the incorporation of Al atoms into the lattices. The near-edge X-ray absorption fine-structure showed a sharp exciton peak due to diamond, which is attributed to the enlarged grains.
- 2012-06-25
著者
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OHMAGARI Shinya
Department of Applied Science for Electronics and Materials, Kyushu University
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Yoshitake Tsuyoshi
Department of Applied Physics, Faculty of Engineering, Kyushu University
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Katamune Yuki
Department of Applied Science for Electronics and Materials, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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Suzuki Itsuroh
Department of Applied Science for Electronics and Materials, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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