Emission Studies of the Plume Produced by KrF Laser Ablation of Fe in Ambient Nitrogen Gas
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概要
- 論文の詳細を見る
Time-resolved emission measurements for an expanding plume during laser ablation of Fe in nitrogen gas are performed. Most emissions are identified as being dtue to Fe netrals and are divided into two groups with different time-of-fliglnt distribution, which are fitted witln shifted Maxwelliazr distribution. The most probable velocities are estimated to be 2 × l0^4 m/s and 1 × 10^4 m/s. Becatuse of the apparent time lag between the emission of N^+_2 and that of an Fe neutral, it is considered that N^+_2 does not contribtute to the nitridation of deposited thin film.
- 社団法人応用物理学会の論文
- 1997-05-01
著者
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Yoshitake T
Kyushu Univ. Fukuoka Jpn
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Yoshitake Tsuyoshi
Department Of Applied Science For Electronics And Materials Kyushu University
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Yoshitake Tsuyoshi
Department of Applied Physics, Faculty of Engineering, Kyushu University
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