Droplet-Free Thin Films Prepared by Pulsed Laser Deposition Using a Vane Velocity Filter : Short Note
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概要
- 論文の詳細を見る
Pulsed laser deposition is an effective method of fabricating a large variety of thin films. However, it has a serious disadvantage in that many droplets with diameters of 1-10μm are deposited together with the ablation species. In order to eliminate droplets, a velocity filter containing many vanes was adopted, by means of which the number of droplets decreased markedly. The velocity distribution of the droplets was obtained for various droplet sizes. The maximum velocity of the droplets is 65m/s. This shows that it is possible to eliminate the droplets completely at a suitable cutoff velocity of the filter. [DOI: 10.1143/JJAP.41 .836]
- 社団法人応用物理学会の論文
- 2002-02-15
著者
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Nagayama Kunihito
Department of Aeronautics and Astronautics, Kyushu University
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Yoshitake Tsuyoshi
Department Of Applied Science For Electronics And Materials Kyushu University
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Nagayama Kunihito
Department Of Aeronautics And Astronautics Kyushu University
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SHIRAISHI Gousuke
Department of Applied Science for Electronics and Materials, Kyushu University
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Shiraishi Gousuke
Department Of Applied Science For Electronics And Materials Kyushu University
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Nagayama Kunihito
Department Of Aeronautics And Astronautics
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YOSHITAKE Tsuyoshi
Department of Applied Science for Electronics and Materials, Kyushu University
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Yoshitake Tsuyoshi
Department of Applied Physics, Faculty of Engineering, Kyushu University
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