Near-Edge X-ray Absorption Fine-Structure Spectroscopic Study on Nitrogen-Doped Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Composite Films Prepared by Pulsed Laser Deposition

概要

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Nitrogen-doped ultrananocrystalline diamond (UNCD)/hydrogenated amorphous carbon (a-C:H) composite films, which possessed n-type conduction with enhanced electrical conductivity, were prepared by pulsed laser deposition. The film doped with a nitrogen content of 7.9 at. % possessed enhanced electrical conductivity of 18 $\Omega^{-1}$$\cdot$cm-1 at 300 K. The near-edge X-ray absorption fine-structure (NEXAFS) measurement indicated the appearance of additional peaks due to $\pi^{*}$ C=N, $\sigma^{*}$ C=N, and $\sigma^{*}$ C--N bonds compared with the spectra of undoped films. The sp2 bonding fraction estimated from the NEXAFS spectra increased with the nitrogen content. The enhanced electrical conductivity is probably due to the formation of additional $\pi^{*}$ and $\sigma^{*}$ states and the enhancement in the sp2 bonding fraction.
2011-08-25