Formation of p-Type Semiconducting Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Composite Films by Boron Doping
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概要
- 論文の詳細を見る
p-Type ultrananocrystalline diamond (UNCD)/hydrogenated amorphous carbon (a-C:H) composite films were fabricated by pulsed laser deposition using boron-doped graphite targets. Thermal analysis confirmed the occurrence of p-type conduction. The electrical conductivity increased with the doped amount of boron. An activation energy estimated from the Arrhenius plot was approximately 0.1 eV. Near-edge X-ray absorption fine structure spectra revealed that the $\sigma^{*}$C–H peak weakened and the $\sigma^{*}$C–B peak strengthened with an increase in the doped amount of boron. Fourier transform infrared spectroscopy showed that the sp3 C–H peak weakened with the doped amount of boron. These probably indicate that the hydrogen atoms that terminate the dangling bonds of UNCD crystallites are partially replaced with boron atoms.
- 2010-03-25
著者
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Nagano Akira
Department Of Orthopaedic Surgery Hamamatsu University School Of Medicine
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Yoshitake Tsuyoshi
Department Of Applied Science For Electronics And Materials Kyushu University
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Hiroyuki Setoyama
Kyushu Synchrotron Light Research Center, Tosu, Saga 841-0005, Japan
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Ryota Ohtani
Kyushu Synchrotron Light Research Center, Tosu, Saga 841-0005, Japan
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OHMAGARI Shinya
Department of Applied Science for Electronics and Materials, Kyushu University
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Shinya Ohmagari
Department of Applied Science for Electronics and Materials, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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Eiichi Kobayashi
Kyushu Synchrotron Light Research Center, Tosu, Saga 841-0005, Japan
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Takeshi Hara
Department of Electronics and Information Engineering, Ariake National College of Technology, Omuta, Fukuoka 836-8585, Japan
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Kunihito Nagayama
Department of Aeronautics and Astronautics, Kyushu University, Fukuoka 819-0395, Japan
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Yoshitake Tsuyoshi
Department of Applied Physics, Faculty of Engineering, Kyushu University
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Nagano Akira
Department of Applied Science for Electronics and Materials, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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