Effects of Hydrogen and Nitrogen Atmospheres on Growth of Ultrananocrystalline Diamond/Amorphous Carbon Composite Films by Reactive Pulsed Laser Deposition
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概要
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The growth of ultrananocrystalline diamond/nonhydrogenated amorphous carbon composite films was realized by pulsed laser deposition with a graphite target in a nitrogen atmosphere totally excluding hydrogen. The existence of 7 nm diamond grains was confirmed by X-ray diffraction. Nitrogen incorporation into the films was confirmed by X-ray photoemission and near-edge X-ray absorption structure spectroscopies, and the nitrogenation produced n-type conduction with an electrical conductivity of 0.2 \Omega^{-1}\cdot cm<sup>-1</sup>at 300 K. The results of study proved that nitrogen acts as a reactive gas for the formation of diamond grains, similarly to hydrogen.
- 2013-06-25
著者
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Shaban Mahmoud
Department of Applied Science for Electronics and Materials, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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Yoshitake Tsuyoshi
Department of Applied Physics, Faculty of Engineering, Kyushu University
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Gima Hiroki
Department of Applied Science for Electronics and Materials, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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AL-RIYAMI Sausan
Department of Applied Science for Electronics and Materials, Kyushu University
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