Nitrogen-Doped Ultrananocrystalline Diamond/Hydrogenated Amorphous Carbon Composite Films Prepared by Pulsed Laser Deposition
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概要
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Nitrogen-doped ultrananocrystalline diamond/hydrogenated amorphous carbon composite (UNCD/a-C:H) films were deposited by pulsed laser deposition. The film doped with a nitrogen content of 7.9 at. % possessed n-type conduction with an electrical conductivity of 18 $\Omega^{-1}$$\cdot$cm-1 at 300 K. A heterojunction with p-type Si exhibited typical rectifying action. The UNCD grain size was estimated to be 2.5 nm from X-ray diffraction measurement. Near-edge X-ray absorption fine-structure and Fourier transform infrared spectroscopies revealed the preferential formations of C N and C--N bonds and an enhanced amount of sp2 bonds in the films.
- 2010-11-25
著者
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OHMAGARI Shinya
Department of Applied Science for Electronics and Materials, Kyushu University
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Yoshitake Tsuyoshi
Department of Applied Physics, Faculty of Engineering, Kyushu University
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AL-RIYAMI Sausan
Department of Applied Science for Electronics and Materials, Kyushu University
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