Time-Resolved Spectroscopic Observation of Deposition Processes of Ultrananocrystalline Diamond/Amorphous Carbon Composite Films by Using a Coaxial Arc Plasma Gun
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概要
- 論文の詳細を見る
The deposition of ultrananocrystalline diamond (UNCD)/amorphous carbon composite films using a coaxial arc plasma gun in vacuum and, for comparison, in a 53.3 Pa hydrogen atmosphere was spectroscopically observed using a high-speed camera equipped with narrow-band-pass filters. UNCD crystallites with diameters of approximately 1.6 nm were formed even in vacuum. These extremely small crystallites imply that the formation is predominantly due to nucleation without the subsequent growth. Even in vacuum, emissions from C+ ions, C atoms, and C2 dimers lasted for approximately 100 μs, although the emission lifetimes of these species are generally 10 ns. We consider that the nucleation is due to the supersaturated environment containing excited carbon species with large number densities.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2010-08-25
著者
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Yoshitake Tsuyoshi
Department Of Applied Science For Electronics And Materials Kyushu University
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Nishiyama Takashi
Department Of Applied Chemistry Graduate School Of Engineering Tokyo University Of Agriculture And T
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Nagayama Kunihito
Department Of Aeronautics And Astronautics
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Hanada Kenji
Department Of Cardiology Hirosaki University Graduate School Of Medicine
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Yoshitake Tsuyoshi
Department of Applied Physics, Faculty of Engineering, Kyushu University
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Hanada Kenji
Department of Applied Science for Electronics and Materials, Kyushu University, Kasuga, Fukuoka 816-8580, Japan
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Nishiyama Takashi
Department of Aeronautics and Astronautics, Kyushu University, Fukuoka 819-0395, Japan
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Nishiyama Takashi
Department of Aeronautics and Astronautics, Faculty of Engineering, Kyushu University, Motooka, Nishi-ku, Fukuoka 819-0395, Japan
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NISHIYAMA Takashi
Department of Aeronautics and Astronautics, Faculty of Engineering, Kyushu University
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