結晶性Si/NiFe/FeCoB裏打ち軟磁性層を用いた垂直磁気記録媒体

概要

論文の詳細を見る
Reducing the thickness of the Ru intermediate layer (IML) is one of the most effective ways of realizing high-density hard disk drives and magnetic tapes. Use of a crystalline soft magnetic underlayer (SUL) has the advantage of reducing the IML thickness and results in better (001) orientations in both Ru IML and CoPtCr-SiO2 recording layer (RLs). Ru or Si/NiFe seed layers improve the degree of FeCo(110) orientation in the SUL and the c-axis orientation of the RL. An Ru/FeCoB layer and an Si/NiFe/FeCoB layer were compared for crystalline orientation and magnetic properties. The integrated intensity of the (002) diffraction peak of CoPtCr had an almost constant value even when the thickness of the Ru IML was changed from 30 nm to 2 nm. The coercivity and squareness ratio in the direction perpendicular to the of recording layer maintained the same value even when reducing the thickness of the Ru IML was reduced from 30 nm to 5 nm.