Growth of homogeneous InGaSb ternary bulk crystal and the observation of composition profile in the solution by X-ray penetration method (電子部品・材料)
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概要
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We introduce a growth technique to grow homogeneous In_xGa_<1-x>Sb ternary bulk crystal and a method to measure the composition profiles in the InGaSb solution. In_xGa_<1-x>Sb bulk crystal was grown on a GaSb seed under a constant temperature gradient using a GaSb (seed)/InSb/GaSb (feed) sandwich sample. During growth, heat pulse technique was applied to estimate the growth rate. Homogeneous In_<0,03>Ga_<0.47>Sb crystal was grown by cooling the sample at an optimized value estimated by the temperature gradient and the growth rate. It was also demonstrated that the X-ray penetration method was a good method to measure the composition profiles in the solution.
- 2009-05-07
著者
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Koyama Tadanobu
Research Institute of Electronics, Shizuoka University
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Hayakawa Yasuhiro
Research Institute of Electronics, Shizuoka University
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Aoki Toru
Research Institute Of Electronics Shizuoka University・graduate School Of Electronic Science And Tech
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Morii Hisashi
Research Institute Of Electronics Shizuoka University
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RAJESH Govindasamy
Research Institute of Electronics, Shizuoka University
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MOMOSE Yoshimi
Research Institute of Electronics, Shizuoka University
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TANAKA Akira
Research Institute of Electronics, Shizuoka University
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OZAWA Tetsuo
Shizuoka Institute of Science and Technology
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INATOMI Yuko
Japan Aerospace Exploration Agency
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Aoki Toru
Shizuoka Univ. Hamamatsu Jpn
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Aoki Toru
Research Institute Of Electronics Shizuoka University
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Rajesh Govindasamy
Research Institute Of Electronics Shizuoka University
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Inatomi Yuko
Japan Aerospace Exploration Agency Kanagawa Jpn
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Momose Yoshimi
Research Institute Of Electronics Shizuoka University
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Koyama T
Research Institute Of Electronics Shizuoka University
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Koyama Tadanobu
Research Institute Of Electronics Shizuoka University
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Hayakawa Y
Research Institute Of Electronics Shizuoka University
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Hayakawa Yasuhiro
Research Institute Of Electronics Shizuoka University
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Tanaka Akira
Research Institute Of Electronics Shizuoka University
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Tanaka Akira
Research And Development Phadia Kk
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Aoki Toru
Reseach Institute of Electronics, Shizuoka University, Hamamatsu 432-8011 Japan
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OZAWA Tetsuo
Shizuoka Industrial Foundation
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