An Improved Czochralski Technique for Growing Single Crystals with High Homogeneity
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概要
- 論文の詳細を見る
InSb single crystals with high homogeneity were grown by an improved Czochralski technique. The distinctive feature of this technique is that a seed crystal is rotated alternately clockwise and counterclockwise within a narrow range of angles. The periodic fluctuation of the growth rate in InSb pulled crystals was remarkably decreased and, as a result, the impurity inhomogeneity was reduced.
- 社団法人応用物理学会の論文
- 1987-01-20
著者
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Hayakawa Yasuhiro
Research Institute of Electronics, Shizuoka University
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Hayakawa Yoshinori
Institute Of Basic Medical Sciences University Of Tsukuba
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KUMAGAWA Masashi
Research Institute of Electronics, Shizuoka University
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杉村 誠
Shizuoka Univ. Hamamatsu Jpn
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杉村 誠
岐阜大学農学部獣医学科家畜臨床繁殖学研究室:(現)愛知県西尾保健所
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Hayakawa Yasuhiro
Research Institute Of Electronics Shizuoka University
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Hayakawa Yasuhiro
Department Of Chemical Engineering Waseda University
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Kumagawa Masashi
Research Institute Of Electrical Communication Tohoku University:(present Address) Research Institut
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Tamaki M
Department Of Chemistry Toho University
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Tamaki Makoto
Research Institute Of Electronics Shizuoka University
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