Compositional Variations of TiAlN Films Deposited by Metalorganic Atomic Layer Deposition Method

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2002-02-15

著者

• Kim Young

  Division of Cardiology, Yeungnam University Medical Center

• Kim Hyo

  Division of Cardiology, Department of Internal Medicine, Seoul National University College of Medici

• Kim Ju

  Division of Cardiology, Department of Internal Medicine, Chonnam University Hospital

• Kim Hyo

  Division Of Cardiology Department Of Internal Medicine College Of Medicine Seoul National University

• Kim Yousoo

  Surface Chemistry Laboratory Riken

• Kim J

  Division Of Materials Science And Engineering Hanyang University

• KIM Yangdo

  Division of Materials Science and Engineering, Hanyang University

• JEON Hyeongtag

  Division of Materials Science and Engineering, Hanyang University

• Jeon H

  Hanyang Univ. Seoul Kor

• Kim Ju

  Division Of Materials Science And Engineering Hanyang University

• Kim Y

  Surface Chemistry Laboratory

• Jeon Hyeongtag

  Division Of Materials Science And Engineering Hanyang University

• Kim Young

  Division Of Applied Plant Science Agricultural Plant Stress Research Center

• Jeon Hyeongtag

  Division Of Materials Science & Engineering Hanyang University

• Kim Hyo

  Division Of Materials Science And Engineering Hanyang University

• Kim Ju

  Division Of Cardiology Severance Cardiovascular Hospital Yonsei University College Of Medicine

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