Characteristics of TiN Films Deposited by Remote Plasma-Enhanced Atomic Layer Deposition Method
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2003-04-15
著者
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Kim Ju
Division of Cardiology, Department of Internal Medicine, Chonnam University Hospital
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JEON Hyeongtag
Division of Materials Science and Engineering, Hanyang University
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KIM Yangdo
School of Materials Science and Engineering, Pusan National University
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