Comparison of TiN Films Deposited Using Tetrakisdimethylaminotitanium and Tetrakisdiethylaminotitanium by the Atomic Layer Deposition Method
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-07-15
著者
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Kim Young
Division of Cardiology, Yeungnam University Medical Center
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Kim Ju
Division of Cardiology, Department of Internal Medicine, Chonnam University Hospital
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Kim Yousoo
Surface Chemistry Laboratory Riken
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Kim J
Division Of Materials Science And Engineering Hanyang University
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CHOI Gil
Division of Materials Science and Engineering, Hanyang University
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KIM Yangdo
Division of Materials Science and Engineering, Hanyang University
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JEON Hyeongtag
Division of Materials Science and Engineering, Hanyang University
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Kim Ju
Division Of Materials Science And Engineering Hanyang University
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Kim Y
Surface Chemistry Laboratory
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