A study of the incorporation of conducting materials into direct-patternable SnO2 thin films formed by photochemical metal-organic deposition
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概要
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Ag nanoparticles and multi-wall carbon nanotubes (MWNTs) were incorporated into a SnO2 photosensitive precursor solution, and a direct-patternable film was prepared by photochemical metal-organic deposition. SnO2 film transmittance and crystallinity were slightly reduced by light absorption of Ag nanoparticles and light scattering by MWNTs. In the case of mixed incorporation of Ag nanoparticles and MWNTs, the sheet resistance of SnO2 hybrid films was decreased relative to incorporation of either single material. Direct-patterning of SnO2 hybrid films was performed without photoresist or dry etching. These results suggest that a micro-patterned system can be simply fabricated at a low cost, and the electrical properties of SnO2 films can be improved by incorporating Ag nanoparticles with MWNTs.
- 公益社団法人 日本セラミックス協会の論文
著者
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Chang Ho
Department Of Electronic Engineering Dankook University
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JEON Hyeongtag
Division of Materials Science and Engineering, Hanyang University
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PARK Hyung-Ho
Department of Ceramic Engineering, Yonsei University
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Park Hyung-ho
Department Of Ceramic Engineering Yonsei University
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KIM Hyuncheol
Department of Materials Science and Engineering, Yonsei University
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GONG Su
Department of Electronics Engineering, Dankook University
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Kim Hyuncheol
Dep. Of Materials Sci. And Engineering Yonsei Univ.
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Jeon Hyeongtag
Division Of Materials Science & Engineering Hanyang University
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Chang Ho
Department Of Chemical Engineering And Bio Process Engineering Research Center Korea Advanced Instit
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PARK Hyung-Ho
Department of Materials Science and Engineering, Yonsei University
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Kim Hyuncheol
Department of Materials Science & Engineering, Yonsei University
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