Effects of H_2 Addition in Magnetized Inductively Coupled C_2F_6 Plasma Etching of Silica Aerogel Film

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-12-30

著者

• YEOM Geun-Young

  Department of Materials Engineering, Sungkyunkwan University

• PARK Hyung-Ho

  Department of Ceramic Engineering, Yonsei University

• Wang Seok-Joo

  Department of Materials Science and Engineering, Yonsei University

• Wang Seok-joo

  Department Of Ceramic Engineering Yonsei University

• Yeom Geun-young

  Department Of Materials Engineering Sungkyunkwan University

• Park Hyung-ho

  Department Of Ceramic Engineering Yonsei University

関連論文

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• Fabrication and Characterization of Pt-Oxide Electrode for Ferroelectric Random Access Memory Application
• Recovery of Silicon Surface after Reactive Ion Etching of SiO_2 using CHF_3/C_2F_6 Plasma
• Effect of SrTiO3 buffer layer on the phase formation and properties of direct-patternable BiFeO3 thin films fabricated using photochemical metal-organic deposition
• Electric and ferroelectric properties of a multilayer film of Nd2Ti2O7 and Bi3.25La0.75Ti3O12 for use as a ferroelectric field effect transistor
• Ferroelectric properties of direct-patternable La substituted Bi_4Ti_3O_ thin films formed by photochemical metal-organic deposition
• Size effect of substitutional alkaline-earth elements on the electrical and structural properties of LaMnO3 films
• High-Rate Dry Etching of ZnO in BCl_3/CH_4/H_2 Plasmas
• Interfacial Reaction between Aluminum Metal and Boron-Doped Polysilicon in a Planar Type Antifuse Device
• A Study of Electrical Damage to a-Si:H Thin Film Transistor during Plasma Ashing by a Pin-to-Plate Type Atmospheric Pressure Plasma
• The Effect of N_2 Flow Rate in He/O_2/N_2 on the Characteristics of Large Area Pin-to-Plate Dielectric Barrier Discharge
• A study of the incorporation of conducting materials into direct-patternable SnO2 thin films formed by photochemical metal-organic deposition
• Angle Resolved X-Ray Photoelectron Spectroscopic Analysis on the Surface of Wet-etched Copper
• Enhancement of adhesion ability and high-temperature stability of silver paste film by incorporation of SnO2 conducting oxide
• Effects of H_2 Addition in Magnetized Inductively Coupled C_2F_6 Plasma Etching of Silica Aerogel Film
• Facile synthesis and size control of Ag nanoparticles by a photochemical reduction at room temperature
• Study of the electrical enhancement of direct-patternable Ag-nanostructures embedded SnO_2 thin films prepared by photochemical metal-organic deposition
• Effects of Etch-Induced Damage and Contamination on the Physical and Electrical Properties of Cobalt Silicides
• Precise Depth Control of Silicon Etching Using Chlorine Atomic Layer Etching
• Amelioration of the Interfacial Properties in Au/GaAs Schottky Contact Using Sulfidation and Hydrogenation
• The Effect of Ar^+ Ion Bombardment on SiO_2 Aerogel Film
• Etch Properties of Gallium Nitride Using Chemically Assisted Ion Beam Etching (CAIBE)
• Study on the Electrical and Thermal Conductivity of Ordered Mesoporous TiO2 Thin Film Incorporated with Pt Nanoparticles
• Properties and Applications of a Modified Dielectric Barrier Discharge Generated at Atmospheric Pressure
• Effects of Post Annealing and Oxidation Processes on the Removal of Damage Generated during the Shallow Trench Etch Process
• Characteristics of Ag Etching using Inductively Coupled Cl_2-based Plasmas
• Effect of Gas Mixing Ratio on Etch Behavior of Y2O3 Thin Films in Cl2/Ar and BCl3/Ar Inductively Coupled Plasmas
• Tin Oxide Films Deposited by Ozone-Assisted Thermal Chemical Vapor Deposition
• Precise Depth Control of Silicon Etching Using Chlorine Atomic Layer Etching
• High-Rate Dry Etching of ZnO in BCl3/CH4/H2 Plasmas
• Characteristics of Ag Etching using Inductively Coupled Cl2-based Plasmas
• Fabrication and Characterization of Direct-Patternable ZnO Films Containing Pt Nanoparticles
• A Study of Electrical Damage to a-Si:H Thin Film Transistor during Plasma Ashing by a Pin-to-Plate Type Atmospheric Pressure Plasma
• The Effect of N2 Flow Rate in He/O2/N2 on the Characteristics of Large Area Pin-to-Plate Dielectric Barrier Discharge
• The Effective Control of Pd/GaAs Interface by Sulfidation and Thermal Hydrogenation
• Effect of Surface Chemisorption between Poly(3,4-ethylenedioxythiophene):Poly(styrene sulfonate) and Ag Nanoparticles on the Conductivity of the Nanocomposite Film

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