Properties of YiBa_2Cu_3O7_<7-x> Superconducting Thin Films Prepared by Reactive Evaporation Method

概要

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The superconducting YBa_2Cu_3O_<7-x> (YBCO) thin films on MgO(100) substrates were prepared by a reactive evaporation method. Superconducting transition temperature and crystal quality were examined as a function of the substrate temperature (T_5) and the oxygen partial pressure (P_<O_2>). The as-grown thin films at the substrate temperature of 620℃ exhibited a zero resistance temperature (T_c_<zero>) of 83 K with the onset (T_c_<onset>) temperature of 88 K under the P_<O_2> of 2×10^<-3> Torr. The lattice parameter c was about 11.74 Å for the as-grown film with T_c_<zero> of 80 K and was shortened to about 11.70 Å by the post-annealing at 900℃ for 10 min in O_2 flow, although T_c_<zero> was not changed. This phenomena may be ascribed to the deficiency of oxygen in the CuO_2 plane of the YBCO layered perovskite structure.
社団法人応用物理学会の論文
1990-12-20