CASEを用いたMEMS最適設計手法の提案(J01-4 最適構造設計,J01 エレクトロニクス実装における熱制御および信頼性評価)

概要

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We report on the development of a new micro-electro-mechanical systems (MEMS) optimal design method called Computer Aided System Evaluation (CASE), which supports the total system evaluation of MEMS devices before the design stage. In our design method, we can clarify and simplify the relation between design parameters and the system characteristics using a CASE weighted orthogonal array. In the CASE array, the sensitivity of each design factor for the system performance shows numerically how the design parameter influences the system characteristics. The existent trade-offs between design parameters can be minimized by both modifying the design concept and adjusting the sensitivities. Therefore MEMS designers are able to optimize the total system based on the information from the CASE array. To conduct the informative optimal design method at the beginning of development leads the reduction of the total MEMS design time and cost.
社団法人日本機械学会の論文
2004-09-04