Effect of Light Soaking Temperature on the Metastable Defect Distribution in Magnetron Sputtered Hydrogenated Amorphous Silicon Films
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1989-10-20
著者
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TANAKA Kazunobu
Electrotechnical Laboratory
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OKUSHI Hideyo
Electrotechnical Laboratory
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BANDYOPADHYAY A.
Indian Association for the Cultivation of Science
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BANERJEE Ratnabali
Indian Association for the Cultivation of Science
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BATABYAL A.
Indian Association for the Cultivation of Science
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BARUA A.
Indian Association for the Cultivation of Science
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Barua A
Indian Assoc. Cultivation Of Sci. Kolkata Ind
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Bandyopadhyay A
Indian Assoc. Cultivation Of Sci. Calcutta Ind
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