A Modulated DLTS Method for Large Signal Analysis (C^2-DLTS)
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概要
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For the analysis of deep-level parameters in semiconductors, a new DLTS (Deep-Level Transient Spectroscopy) method has been proposed, in which a squaring device for the capacitance-signal processing is used with the conventional DLTS system. This method (C^2-DLTS) is simple and is especially effective in the precise analysis of large signals due to deep-level impurities and defects.
- 社団法人応用物理学会の論文
- 1981-01-05
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