Experimental Study of Very-High-Frequency Plasmas in H_2 by Spatiotemporally Resolved Optical Emission Spectroscopy (<Special Issue> Plasma Processing)

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1994-07-30

著者

• OKABE Yutaka

  Department of Physics,Tohoku University

• KAKUTA Shigeru

  Department of Electrical Engineering, Keio University

• MAKABE Toshiaki

  Department of Electrical Engineering, Keio University

• Okabe Yutaka

  Department Of Applied Chemistry Science And Engineering Waseda University

• Okabe Yutaka

  Department Of Electrical Engineering Faculty Of Science And Technology Keio University

• Makabe Toshiaki

  Department Of Electrical Engineering Faculty Of Science And Technology Keio University

• Kakuta Shigeru

  Department Of Electrical Engineering Faculty Of Science And Technology Keio University

• KITAJIMA Takeshi

  Department of Electrical Engineering, Faculty of Science and Technology, Keio University

• Kitajima Takeshi

  Dainippon Screen Manufacturing Co. Ltd.

• Kitajima Takeshi

  Department Of Electrical And Electronic Engineering National Defense Academy

関連論文

• Anomalous Nuclear Relaxation and Knight Shift Behaviors of ^Tl in High-T_c Tl_2Ba_2Ca_1Cu_2O_
• Noncontact Measurement of Sodium Ions in Silicon Oxide
• Isotope Effect in Superconducting YBa_2Cu_3O_ System
• Influence of Ar Metastable on the Discharge Structure in Ar and N_2 Mixture in RF Discharges at 13.56 MHz ( Plasma Processing)
• Two-Dimensional Modeling of Spatiotemporal Structure of Inductively Coupled Plasma
• Dependence of Driving Frequency on Capacitively Coupled Plasma in CF_4
• A Study of the Sustaining Mechanism in an Inductively Coupled Plasma ( Plasma Processing)
• Site-Dependent ^O Substitution in YBa_2Cu_3O_7 Studied by Raman Scattering Measurements
• Using Sequential Importance Sampling for Nonequilibrium Reweighting
• NMR and NQR Studies of ^O and ^Cu in CuO_2 Plane of High-T_c YBa_2 Cu_3O_ with T_c=61K
• Growth of YBa_2Cu_3O_ Single Crystals
• A Simple Method of Monte Carlo Renormalization Group
• Two-Dimensional Transport of Submicron Particles in Capacitively Coupled Plasma Reactor
• Phase Transitions in DC Discharges in SiH_4
• Optical Emission Spectroscopy of Pulsed Inductively Coupled Plasma in Ar : Nuclear Science, Plasmas, and Electric Discharges
• Critical Phenomenon in a Neural Network Model : A Localization-Delocalization Transition of Excited Clusters
• Two-Dimensional Self-Consistent Simulation of a DC Magnetron Discharge
• Experimental Study of Very-High-Frequency Plasmas in H_2 by Spatiotemporally Resolved Optical Emission Spectroscopy ( Plasma Processing)
• Duality in the Ising Model on the Quasicrystals
• Monte Carlo Simulation of the Ising Model on the Penrose Lattice
• Investigation of Surface Contamination on Silicon Oxide after Hydrofluoric Acid Etching by Noncontact Capacitance Method
• Evaluation of Surface Contamination by Noncontact Capacitance Method under UV Irradiation
• Rare Gas Metastable Atom Density in Diluted O_2 RF Plasmas
• Optical Diagnostics of a Pulsed Inductively Coupled Nitrogen Plasma
• Nitrogen Atom Densities in Rare Gas Diluted N_2 Plasmas with Capacitive and Inductive Coupling
• A Numerical Study of a Collision-Dominated Inductively Coupled Plasma Using Particle-in-Cell/Monte Carlo Simulation
• Effect of Surface Material on Spatiotemporal Structure in O_2 RF Glow Discharge
• Correlation between Magnetic Properties and Composition of Electroless-Plated Cobalt Alloy Films for Perpendicular Magnetic Recording Media
• Exact Diagonalization Study of the Spin 1/2 XXZ Model on the 4×4 Square Lattice
• The Radical Transport in the Narrow-Gap-Reactive-Ion Etcher in SF_6 by the Relaxation Continuum Model
• High-Temperature Series Analysis for the Classical n-Vector Model with a Free Surface : Condensed Matter and Statistical Physics
• Local Interactions and Van Hove Singularities in High-T_c Superconductors
• Theoretical Analysis of Electron Velocity Distribution Functions and Transport Coefficients in HCl in a DC Electric Field
• Probability-Changing Cluster Algorithm : Study of Three-Dimensional Ising Model and Percolation Problem
• A Novel Sustaining Mechanism in Capacitively Coupled Radio Frequency Plasma in Oxygen
• A novel sustaining mechanism in capacitively coupled radiofrequency plasma
• Numerical Study of the Effects of Frequency in Inductively Coupled Plasma Using Particle-in-Cell/Monte Carlo Simulation
• On the Ground-State Phase Transition of the Spin 1/2 XXZ Model on the Square Lattice
• The 1/n Expansion for the n-Vector Model in the Semi-Infinite Space
• The 1/n Expansion to the Extraordinary Transition of Semi-Infinite System : Condensed Matter and Statistical Physics
• Exact Surface-Layer Magnetization of 2D Ising Models with Alternately Layered Exchange Interactions and Alternate Surface Magnetic Field : Reentrant Phenomena at Surfaces
• Systematic Study on the Critical Amplitude Γ for the Classical n-Vector Model in the High-Temperature Expansion
• Third-Order Temporal Correlation of Rayleigh Scattering
• Higher-Order Calculations for Weakly Random System in 1/n Expansion
• 1/n Expansion up to Order 1/n^2. I : Equation of State and Correlation Function
• Critical Relaxation of Three-Dimensinal Kinetic Ising Model
• Transition Temperature Enhancement Due to Aniferromagnetic Fluctuations in High-T_c Oxide Superconductors
• Cluster-Spin Quantum Monte Carlo Study of One-Dimensional Heisenberg Model
• Novel Aspect of the Critical Temperature of One-Dimensional Charge-Density-Wave Superconductors
• Transition-Matrix Monte Carlo Method for Quantum Systems(General)
• A Comparison of External Optimization with Flat-Histogram and Equal-Hit Dynamics for Finding Spin-Glass Ground State
• Melting of the Phase Locking of Linear Charge Density Waves in TTF-TCNQ
• Order-Parameter Distribution Function and Order of the Phase Transition of the Ferromagnetic Potts Model
• Comment on "Surface Critical Phenomena in Nonlinear Sigma Model"
• Quantum Monte Carlo Simulation of the Spin 1/2 XXZ Model on the Square Lattice
• General Scaling Theory of Magnetization and Susceptibility Profiles for a Semi-Infinite System : Condensed Matter and Statistical Physics
• A Scaling approach to Monte Carlo Renormalization Group
• Scaling Functions for the Surface Equation of State and for the Correlation Length : Monte Carlo Study : Condensed Matter and Statistical Physics
• Monte Carlo Study of the Surface Critical Phenomena of the Ising Model : Condensed Matter and Statistical Physics
• Effects of Shape and Boundary Conditions on Finite-Size Scaling Functions for Anisotropic Three-Dimensional Ising Systems
• 1/n Expansion Up to Order 1/n^2. IV : Critical Amplitude Ratio R_x
• Phase Transition of Two-Dimensional Diluted XY and Clock Models
• Effects of Plasma Molding on Feature Profile of Silicon Micro-Electro-Mechanical Systems through Flux Ion Velocity Distributions in Two-Frequency Capacitively Coupled Plasma in SF6/O2
• Influence of the Finite Mass-Ratio on the Charged-Particle Transport in Gases
• Logarithmic Corrections to a Simple Power Law at d=4 in 1/n Expansion
• Theory of Antiferromagnetic Superconductors in the Presence of Nonmagnetic Impurities : One-Dimensional Model : Condensed Matter and Statistical Physics
• Critical Amplitude Ratio ξ_0^+/ξ_0^T in 1/n and ε Expansions
• Time-Dependent RF Swarm Transport by Direct Numerical Procedure of the Boltzmann Equation ( Plasma Processing)
• 1/n Expansion Up to Order 1/n^2. II : Critical Exponent β for d=3
• 1/n Expansion Up to Order 1/n^2. III : Critical exponents γ and ν for d=3
• Measurement of Amount of Pattern Trim and Surface Chemistry for Organic Resist Etching in an Inductively Coupled Plasma in SO2–O2 Gas Mixtures
• Evaluation of Errors in Feedback Control Based on Persistence Prediction in Model-Based Process Controller System for Deep Sub-100 nm Gate Fabrication
• Self-Consistent Modeling of Feature Profile Evolution in Plasma Etching and Deposition
• Large-Scale Monte Carlo Simulation of Two-Dimensional Classical XY Model Using Multiple GPUs
• One-Dimensional Oxygen and Helical Oxygen Nanotubes inside Carbon Nanotubes
• Modeling of Feature Profile Evolution in SiO2 as functions of Radial Position and Bias Voltage under Competition among Charging, Deposition, and Etching in Two-Frequency Capacitively Coupled Plasma
• Effect of Weak Randomness on Corrections to Scaling
• Comment of Effective Critical Exponents in the Spherical Limit
• Transport Coefficients for Electrons in Mixtures of Ar and HBr
• Complete magnetic anisotropy films for perpendicular recording prepared by an electroless plating method.
• Two-Dimensional Transport of Submicron Particles in Capacitively Coupled Plasma Reactor
• A Numerical Study of a Collision-Dominated Inductively Coupled Plasma Using Particle-in-Cell/Monte Carlo Simulation

もっと見る 閉じる

スポンサーリンク