Two-Dimensional Transport of Submicron Particles in Capacitively Coupled Plasma Reactor
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-06-01
著者
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Nakano Nobuhiko
Department Of Electrical Engineering Faculty Of Science And Technology Keio University
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MAKABE Toshiaki
Department of Electrical Engineering, Keio University
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HASHIDO Ryu-ichi
Department of Electrical Engineering, Faculty of Science and Technology, Keio University
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HASEBE Masao
Department of Electrical Engineering, Faculty of Science and Technology, Keio University
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HOSOKAWA Yoshiyuki
Mechanical Engineering Research Laboratory, KOBE STEEL, Ltd.
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YAMAGUCHI Yukio
Yokohama Research Center, Mitsubishi Chemical Corporation
関連論文
- Influence of Ar Metastable on the Discharge Structure in Ar and N_2 Mixture in RF Discharges at 13.56 MHz ( Plasma Processing)
- Two-Dimensional Modeling of Spatiotemporal Structure of Inductively Coupled Plasma
- Dependence of Driving Frequency on Capacitively Coupled Plasma in CF_4
- A Study of the Sustaining Mechanism in an Inductively Coupled Plasma ( Plasma Processing)
- Two-Dimensional Transport of Submicron Particles in Capacitively Coupled Plasma Reactor
- Phase Transitions in DC Discharges in SiH_4
- Optical Emission Spectroscopy of Pulsed Inductively Coupled Plasma in Ar : Nuclear Science, Plasmas, and Electric Discharges
- Two-Dimensional Self-Consistent Simulation of a DC Magnetron Discharge
- Experimental Study of Very-High-Frequency Plasmas in H_2 by Spatiotemporally Resolved Optical Emission Spectroscopy ( Plasma Processing)
- Rare Gas Metastable Atom Density in Diluted O_2 RF Plasmas
- A Numerical Study of a Collision-Dominated Inductively Coupled Plasma Using Particle-in-Cell/Monte Carlo Simulation
- Effect of Surface Material on Spatiotemporal Structure in O_2 RF Glow Discharge
- The Radical Transport in the Narrow-Gap-Reactive-Ion Etcher in SF_6 by the Relaxation Continuum Model
- A Novel Sustaining Mechanism in Capacitively Coupled Radio Frequency Plasma in Oxygen
- A novel sustaining mechanism in capacitively coupled radiofrequency plasma
- Two-Dimensional Transport of Submicron Particles in Capacitively Coupled Plasma Reactor