A Numerical Study of a Collision-Dominated Inductively Coupled Plasma Using Particle-in-Cell/Monte Carlo Simulation
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-07-30
著者
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Oh Jin-sung
Department Of Electrical Engineering Faculty Of Science And Technology Keio University
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MAKABE Toshiaki
Department of Electrical Engineering, Keio University
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Makabe Toshiaki
Department Of Electrical Engineering Faculty Of Science And Technology Keio University
関連論文
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- Self-Consistent Modeling of Feature Profile Evolution in Plasma Etching and Deposition
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