Time-Dependent RF Swarm Transport by Direct Numerical Procedure of the Boltzmann Equation (<Special Issue> Plasma Processing)
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概要
- 論文の詳細を見る
Electron swarm transport in rf fields under spatial homogeneity has been investigated by a direct numerical procedure (DNP) of the Boltzmann equation. The accuracy and validity of the DNP is examined by comparison with the previous results in Reid's inelastic ramp model gas in dc fields. The electron velocity distribution with strong nonlinear time variation and high anisotropy is demonstrated and discussed in Ar with the rf swarm parameter in order to show the power of the DNP over a wide range of frequency.
- 社団法人応用物理学会の論文
- 1994-07-30
著者
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Makabe Toshiaki
Department Of Electrical Engineering Faculty Of Science And Technology Keio University
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Maeda Kenji
Departent Of Cardiology Kobe General Hospital
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Maeda Kenji
Department Of Electrical Engineering Faculty Of Science And Technology Keio University
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