Numerical Study of the Effects of Frequency in Inductively Coupled Plasma Using Particle-in-Cell/Monte Carlo Simulation
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概要
- 論文の詳細を見る
The effects of induction frequency on inductively coupled plasma(ICP)have been investigated in a collision-dominated region in Ar under a constant dissipated power using the particle-in-cell/Monte Carlo(PIC/MC)simulation. The plasma density, potential, electron energy distribution and mean electron energy are discussed as a function of the applied frequencies of 6.78 MHz, 13.56 MHz, 27.12 MHZ and 100 MHz at pressure of 100 m Torr and 300 m Torr.
- 社団法人応用物理学会の論文
- 2000-03-15
著者
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Oh J‐s
Department Of Electrical Engineering Faculty Of Science And Technology Keio University
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Oh Jin-sung
Department Of Electrical Engineering Faculty Of Science And Technology Keio University
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Makabe Toshiaki
Department Of Electrical Engineering Faculty Of Science And Technology Keio University
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